What kind of exhaust gas will semiconductor wafer fab produce
The industrial waste gas from semiconductor production mainly includes organic and acid base waste gases. Organic compounds include: non methane total hydrocarbons, nitrogen oxides, sulfur dioxide, etc; Acids and bases include ammonia, sulfuric acid mist, fluoride, chloride, chlorine, etc. The harmful gases that cause environmental pollution in semiconductor production mainly come from the cleaning, gluing, degumming, etching, and developing processes of chip or circuit board production.
The semiconductor industry mainly involves atmospheric pollution during component assembly and welding processes, and surface treatment processes such as circuit board cleaning, where chemical agents such as sulfuric acid, hydrochloric acid, chlorofluorocarbons, carbon tetrachloride, trichloroethane, and other organic halides are used to volatilize, resulting in environmental pollution. Mechanical noise and a small amount of dust generated during the entire machine assembly process can also cause environmental pollution, These polluting gases can cause chronic or acute poisoning in the population.
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